UA, MonArk NSF Quantum Foundry

Materials Preparation:

• 2D-QMaP Exfoliator: The 2D-QMap exfoliator is an automated system designed to improve the repeatability and efficiency of the exfoliation process for 2D materials. A cutting-edge machine called the Roll-to-Roll Tape Handling System has been developed to streamline the transfer of 2D materials.
• Chemical vapor deposition (CVD): CVD is a vacuum deposition technique utilized for the production of thin-film materials with excellent quality and conformal properties. It offers the ability to synthesize a wide range of two-dimensional materials, using a variety of precursors.
• Molecular Beam Epitaxy (MBE): The MBE system is a high vacuum deposition technique with very high control of thickness. MonArk hosts multi-chamber MBE system which can grow high quality III-V semiconductors as well as 2D materials.

Fabrication:

• NanoFrazor: The NanoFrazor system is a state-of-the-art nanopatterning tool based on local thermal evaporation of the thermal resist using the tip of an AFM. A current is applied to locally heat the AFM tip and transfer heat to the PPA layer and sublimate this layer, making a nanopattern. The resolution of this technique is 50 nm. The system is small in size, compact, and robust to incorporate inside a glove box to fabricate nanodevice of air-sensitive materials.
• µMLA: µMLA -micron photolithography tool uses a 365nm LED to pattern a photosensitive resist. LED is mounted on a moving head which rasters over the sample to generate the desired pattern without the need for any mask. The resolution of this tool is 600nm. uMLA has a fast writing speed of 10mm²/min.
• Thin film deposition system: AJA thin film deposition tool is a high vacuum system that can deposit thin films with two different methods., namely Sputtering and electron beam (e-beam) deposition. Sputtering of various elemental films can be performed using 2 RF and 2 DC sputtering guns. The e-beam system has 6 pocket crucibles. In addition to thin film deposition, the system also consists of argon ion milling capability to clean or etch in situ.
• WireBonder: This machine is a versatile and reliable tool designed for challenging die-attach applications in industries such as RF, microwave, semiconductor, hybrid, and medical devices. It features a gantry-style chassis, a capacitive touchscreen interface, and an 8:1 ratio, purely orthogonal X-Y-Z micromanipulator for precise die placement, with convertibility for both epoxy and eutectic die bonding and programmability for efficient operation.

Characterization:

• Dilution Refrigerator: Dilution refrigerator is a deep cryogenic system with a base temperature of 10mK. This system is capable of performing DC, RF, and optical measurements. It is equipped with 100 DC lines, 8 RF lines, 12T magnet, and optical ports. The measurement lines in this system use multistage filtering to reduce noise. The system is connected with a high throughput data acquisition system allowing fast data acquisition.
• Optical Cryostat: The low-temperature optoelectronic characterization system comprises the OptiCool cryostat by Quantum Designs, which maintains a base temperature of 1.9 K. It is equipped with an external magnet capable of generating magnetic fields up to 7 T. This equipment enables the simultaneous investigation of the optical and electrical properties of materials and devices, facilitated by top/side light-transparent windows and electrical feed-throughs.
• Atomic Force Microscopy (AFM): AFM is a scanning probe microscopy technique that utilizes the interaction between the sample surface and a tip to provide three-dimensional topography imaging at atomic-scale resolution. The system features a low noise floor of 35 picometers, a kinematic tip approach for precise positioning.
• Physical Property Measurement System (PPMS): PPMS is a variable temperature-field system. The temperature of the system can be controlled ranging from 400K -1.9K. This system has a magnetic field of 9T (out of plane). The system is designed to perform a variety of automated measurements.
• SQUID Magnetometer (MPMS): MPMS provides users with the sensitivity of a SQUID (Superconducting QUantum Interference Device) magnetometer and the choice of multiple measurement modes. MPMS incorporates major advances in data acquisition, temperature control and magnetic field control with ≤10-8 emu sensitivity.